Jul 1989 Joined DISCO Corporation Jun 1995 Director, DISCO Corporation Jul 2002 Managing Director, DISCO Corporation Sep 2005 Director, the Company Apr 2009 Representative Director, President, the Company (current) Feb 2010 Chairman, TECNISCO (SuZhou) CO.,Ltd. (current) Aug 2017 Chairman, TECNISCO Advanced Materials Pte. Ltd. (current) May 2019 Chairman, TECNISCO EUROPE GmbH (current) Sep 2023 Chief Executive Officer (CEO), the Company (current)

Jan 1984 Joined DISCO Corporation Aug 2015 Transferred from DISCO Corporation Aug 2015 Joined the Company, Manager of Business Development Office Jul 2017 Executive Officer, Manager of Business Development Office, the Company Aug 2017 President, TECNISCO Advanced Materials Pte. Ltd. (current) Oct 2018 Executive Officer, General Manager of Global Business Division, the Company Apr 2019 Director, TECNISCO (SuZhou) CO.,Ltd. (current) May 2019 President, TECNISCO EUROPE GmbH (current) Jun 2019 Director, General Manager of Global Business Division, the Company Sep 2022 Senior Managing Director, General Manager of Global Business Division, the Company (current) Sep 2023 Chief Global Business Officer (CGBO), the Company Sep 2025 Chief Business Officer (CBO), the Company (current)

Apr 1985 Joined DISCO Corporation Jul 2008 Seconded to the Company Oct 2008 General Manager of Business Department, the Company Nov 2008 Left DISCO Corporation upon transfer to the Company Nov 2009 General Manager of Management Support Department, the Company Jun 2011 Director and General Manager of Management Support Department, the Company Sep 2022 Managing Director, General Manager of Management Support Division, the Company (current) Sep 2023 Chief Financial Officer (CFO), the Company (current)

Apr 1990 Joined LG Electronics Inc., Korea Apr 2003 Associate Professor, Institute for Materials Research, Tohoku University Feb 2007 Co-founded WAVESQUARE, INC., Korea May 2016 Co-founded THE GOODSYSTEM CORP., Korea (equity-method affiliate); Representative Director and CEO (current) Sep 2025 Director, the Company (current) Sep 2025 Chief Technology Officer (CTO), the Company (current)

Apr 1996 Joined Hewlett-Packard Japan, Ltd. (now Hewlett-Packard Japan LLC) Nov 2001 Registered as Patent Attorney Jan 2002 Joined Kaji & Suhara Patent Firm (now ATEN Patent Attorneys Corporation) Dec 2021 Director, the Company (current) Apr 2021 Vice President, Japan Patent Attorneys Association Aug 2022 Head, ATEN Patent Attorneys Corporation (current)

Aug 1992 Joined Lasertec Corporation Jul 1998 Planning Office Manager, Lasertec Corporation Sep 2001 Director, Lasertec Corporation Jan 2004 General Manager of General Affairs Department, Lasertec Corporation Jul 2006 Planning Office Manager, Lasertec Corporation Jul 2007 General Manager of Administration Division and Planning Office Manager, Lasertec Corporation Sep 2007 Director and Executive Officer, Lasertec Corporation Jul 2008 Planning Office Manager and General Affairs Department General Manager, Lasertec Corporation Jul 2009 General Manager of Administration Division, Lasertec Corporation Jan 2011 Representative Director, Lasertec Korea Corporation Jul 2013 General Manager of Quality Assurance Department, Lasertec Corporation Sep 2013 Managing Director, Lasertec Corporation Aug 2015 Chairman, Lasertec Taiwan, Inc. Jun 2017 Chairman, Lasertec China Co., Ltd. Jan 2020 General Manager of Finance and Accounting Department, Lasertec Corporation Sep 2023 Director, the Company (current)

Apr 1984 Joined Asahi Accounting Firm (now Azusa Audit LLC) Oct 1994 Joined Asahi Arthur Andersen K.K. Jun 2003 Joined DISCO Corporation Nov 2009 Joined Square Enix Co., Ltd. Jun 2013 CFO, Square Enix Holdings Co., Ltd. Jul 2020 Joined NET PROTECTIONS Inc. Jun 2021 Director and CFO, NET PROTECTIONS HOLDINGS Inc. Mar 2026 Outside Audit & Supervisory Board Member, Rapidus Inc. (current) Mar 2026 Outside Director (Audit and Supervisory Committee Member), HAKUTEN Co., Ltd. (current) Sep 2026 Director, the Company (current)

Apr 1991 Joined The Tokyo Bank, Ltd. (now MUFG Bank, Ltd.) Sep 2014 Branch Manager, Prague Branch, MUFG Bank (Europe) N.V. Apr 2017 Deputy Branch Manager, Frankfurt Branch, MUFG Bank (Europe) N.V.; President, MUFG Europe Lease (Deutschland) GmbH Aug 2019 Branch Manager, Milan Branch, MUFG Bank, Ltd.; General Manager, Milan Corporate Business Department Sep 2021 Seconded to Rigaku Corporation (later transferred) Aug 2022 CFO, MILabs B.V., Netherlands (subsidiary of Rigaku Corporation) Jan 2025 Global Finance and IR, Rigaku Holdings Corporation (parent of Rigaku Corporation) Sep 2025 Full-time Audit & Supervisory Board Member, the Company (current)

Oct 1984 Joined Showa Audit Corporation (now EY ShinNihon LLC) Jun 1992 Joined Hirayama Tax & Accounting Office (current) May 2015 Auditor, Mejiro Gakuen Educational Corporation (current) Jun 2011 Audit & Supervisory Board Member, the Company (current)

Jan 2004 Joined Ziosoft, Inc. Dec 2009 Registered as Attorney-at-Law (Daiichi Tokyo Bar Association) Dec 2009 Joined Abe, Inokubo & Katayama Law Office Jul 2020 Partner Attorney, Abe, Inokubo & Katayama Law Office (current) Sep 2026 Audit & Supervisory Board Member, the Company (current)