Sep 2006 Joined the Company Nov 2009 General Manager, Software Solutions Department, the Company May 2013 Managing Director, the Company May 2015 Representative Director, President, the Company (current) Apr 2017 Representative Director, Chairman, RORZE ROBOTECH CO.,LTD. (Vietnam) Nov 2021 Director, ADTEC PLASMA TECHNOLOGY CO., LTD. (current) Aug 2024 Director, RORZE ROBOTECH CO.,LTD. (Vietnam) (current)

Sep 1989 Joined the Company Jul 1995 Manufacturing Section Manager, Semiconductor Equipment Department, the Company Jan 1997 Director, President, RORZE ROBOTECH INC. (now RORZE ROBOTECH CO.,LTD.) (Vietnam) (current) May 1997 Director, the Company (current) Aug 2024 Representative Director, Chairman, RORZE ROBOTECH CO.,LTD. (Vietnam) (current)

Jun 1998 Joined the Company Nov 2001 General Manager, Overseas Business Department, the Company May 2003 Director, the Company (current) Jun 2005 Executive Officer, the Company; General Manager, Overseas Business Division, the Company Mar 2011 General Manager, Overseas Sales Department, the Company Jun 2025 Representative Director, President, ROHZE IAS CO., LTD. (current)

Mar 1985 Established the Company; Representative Director, President May 2015 Representative Director, Chairman, the Company May 2017 Director, Advisor, the Company (current)

Oct 1999 Joined O.H.T Co., Ltd. Jul 2008 Director, General Manager, Research and Development Department, Research and Development Division, O.H.T Co., Ltd. Jul 2014 Representative Director, President, O.H.T Co., Ltd. (current) May 2016 Director, the Company (current) Jun 2020 Executive Officer, V Technology Co., Ltd. (current)

Feb 1999 Joined ADTEC Corporation (now ADTEC PLASMA TECHNOLOGY CO., LTD.) Nov 2012 Director, ADTEC Corporation Nov 2018 Representative Director, President, ADTEC PLASMA TECHNOLOGY CO., LTD. (current) May 2022 Director, the Company (current)

Apr 1983 Joined NEC Corporation Dec 2011 Executive Officer, Elpida Memory, Inc. (now Micron Memory Japan K.K.) Apr 2015 Sr. Director, DRAM & Emerging Memory Process Development, Technology Development Division, Micron Technology, Inc. (USA) Nov 2017 Sr. Director, DRAM Process Development, Technology Development Division, Micron Memory Japan K.K. Feb 2023 Area Advisory Board Member, Electronics and Manufacturing Area, National Institute of Advanced Industrial Science and Technology (AIST) (current) Aug 2023 Specially Appointed Professor, Research Institute for Semiconductor Engineering, Hiroshima University (current); Specially Appointed Professor (Visiting), International Center for Integrated Electronics Research and Development, Tohoku University (current) Mar 2024 Outside Director, Nippon Electric Glass Co., Ltd. (current) May 2024 Director, the Company (current)

Jun 2010 Director and CFO, CYAN CO., LTD. Aug 2011 Director, Executive Vice President, CYAN CO., LTD. Jun 2013 Full-time Statutory Auditor, Noritsu Koki Co., Ltd. Jul 2015 Statutory Auditor, Daigi Co., Ltd. (now Daigi System Service Co., Ltd.) May 2017 Full-time Statutory Auditor, the Company (current)

Dec 2011 Registered as attorney-at-law; joined Tano Law Office (now Koraku Sogo Law Office) (current) Aug 2022 Outside Director (Audit and Supervisory Committee Member), Okayama Paper Industries Co., Ltd. (current) May 2024 Statutory Auditor, the Company (current)

Oct 1995 Joined Deloitte Touche Tohmatsu LLC Oct 2010 Joined Yusei Audit Corporation (now Taiyo LLC) Jun 2015 Director, Nakayamafuku Co., Ltd. (current) Oct 2024 Opened Naoko Shibata Certified Public Accountant Office (current) May 2025 Statutory Auditor, the Company (current) Jun 2025 Outside Director (Audit and Supervisory Committee Member), S-Read Co., Ltd. (current)